HighQ
The Compact Recycling Module 1UF
Discover the innovative Compact Recycling Module 1UF – efficient wastewater recycling solution for the CMP process!
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The Compact Recycling Module 1UF
The wastewater from the CMP process to be recycled on site is fed into the integrated recirculation tank via prefiltration. In further process steps, the wastewater is concentrated in the recirculation process via ultrafiltration and at the same time the permeate (water) is removed from the CMP process-wastewater.
Re-use Quality Improvement
The patented recycling plant offers the opportunity to recover and re-use the utilised materials. Resources are thus completely exploited. The quality standards of the chemical raw materials are maintained by the recycling process.
Resource-efficient by Recycling Quota
The re-use of chemical raw materials and process water (permeate) results in significant savings in the production process. Thanks to a recycling rate of up to 85%, only 15% of new raw materials need to be added. This significantly reduces the need for raw materials.
Protection of Water Resources
This recycling plant offers an important contribution to protecting the environment. Harmful nanoparticles are filtered out of the wastewater and this provides a better water quality. The reduced consumption of non-renewable raw materials saves important and valuable resources.
Cost Savings due to Backflushing Processes
The patented and self-cleaning backwashing process of the ultrafiltration modules leads to a significantly longer lifetime of the very cost-intensive filter elements. This pushes the cost efficiency of the entire system.
Chemical Mechanical Planarization (CMP)
Chemical mechanical planarization (CMP) is a polishing process in wafer processing to uniformly remove thin films. In the previous CMP process slurry is a pure waste product which must be passed on, with some complex wastewater treatment and neutralisation, for disposal. With the HighQ-Factory recycling module, wastewater can be separated in its individual components (slurry & water) within a recycling process. 85% of the slurry can thus be returned to the CMP process and re-used.
| Recirculation tank | 700 L |
| Permeate tank | 138 L |
| System dimensions | 2000/1500/2200 mm |
| Weight | 1.1t (empty) 2.1t (maximum) |
Specifications and main features
- Recycling of used slurry, recycling rate > 80%
- Recycling of used water, recycling rate > 80%.
- Liquid extraction > 28 l/min and > 3 bar
- TCP/IP-based remote maintenance
- Fully automatic system
- User-friendly touchscreen panelcore
- S7 PLC control system
- Visible/ audible warnings and alerts
- Password protected operating levels
- High safety standards
- Real-time pre-warning for filter change
- CE certified
Materials
- PP (Polypropylene)
- PFA (Perfluoroalkoxy)
- PVC (Polyvinyl Chloride)
Operating system
- Movicon Scada/HMI
- MS Windows (Microsoft Windows)
Standard analytics
- Density
- Total percent solids
- pH value
- Conductivity
Quality control optional
- Viscosity
- LPC (Bulk counter)
- PSD (Particle Size Distribution)
- Zeta potential (electrokinetic potential)
- Metal analytics
- Silicate
Requirements
- Waste water free from organic solvents and oxidizing agents
- No copper or tungsten impurities
- Temperature: 15°C – 30°C / 59°F – 86°F
- pH value: 2 – 11
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