HighQ
The Recycling Module 8UF
Go for innovation with the 8UF recycling module: Achieve the maximum efficiency in the recovery of water and raw materials.
- OVERVIEW
- application area
- TECHNICAL DATA
- EQUIPMENT
The Recycling Module 8UF
The customer’s wastewater to be recycled from the CMP process is fed into a separate recirculation tank via a pre-filtration module. In further process steps the wastewater is concentrated in the recirculation process via the 8 ultrafilter modules and at the same time to permeate (water) is removed from the process. Due to the patented backflush process, the lifetime of these cost-intensive UF modules will be significantly increased. After the ultrafiltration, the concentrated slurry is made available to the customer’s process via the fine filtration module, or it is fed to the separately available mix & transfer module. Due to the modular design, the equipment may easily be implemented in an existing sub-fab.
Re-use & Quality Improvement
The patented recycling plant offers the opportunity to recover and re-use the utilised materials. Resources are thus completely exploited. The quality standards of the chemical raw materials are maintained by the recycling process.
Resource-efficient by Recycling Quota
The re-use of chemical raw materials and process water (permeate) results in significant savings in the production process. Thanks to a recycling rate of up to 85%, only 15% of new raw materials need to be added. This significantly reduces the need for raw materials.
Protection of Water Resources
This recycling plant offers an important contribution to protecting the environment. Harmful nanoparticles are filtered out of the wastewater and this provides a better water quality. The reduced consumption of non-renewable raw materials saves important and valuable resources.
Cost Savings due to Backflushing Processes
The patented and self-cleaning backwashing process of the ultrafiltration modules leads to a significantly longer lifetime of the very cost-intensive filter elements. This pushes the cost efficiency of the entire system.
Chemical Mechanical Planarization (CMP)
Chemical mechanical planarization (CMP) is a polishing process in wafer processing to uniformly remove thin films. In the previous CMP process slurry is a pure waste product which must be passed on, with some complex wastewater treatment and neutralization, for disposal. With the HighQ-Factory recycling module, wastewater can be separated into its individual components (slurry & water) within a recycling process. 85% of the slurry can thus be returned to the CMP process and re-used.
| Storage tank | Calculated according to customer specifications |
| Permeate tank | Calculated according to customer specifications |
| Return tank | Calculated according to customer specifications |
| Dimensions (L/W/H) | 3400/1820/2239 mm 11.2/6.0/7.3 f |
| Weight | 2.0 t (empty) 2.6 t (empty) |
Specifications and main features
- Recycling von gebrauchtem Slurrypulver, Recyclingrate > 80 %
- Recycling of used water, recycling rate > 80%.
- Liquid extraction > 150 l/min and > 3 bar
- Remote maintenance via TCP/IP
- Fully automatic system
- User-friendly touchscreen panelcore
- S7 PLC control system
- Visible/audible warnings and alerts
- Password protected operating levels
- High safety standards
- Real-time pre-warning for filter change
- CE certification
Materials
- PP (Polypropylene)
- PFA (Perfluoroalkoxy)
- PVC (Polyvinyl Chloride)
Operating system
- Movicon Scada/HMI
- MS Windows (Microsoft Windows)
Standard analytics
- Density
- Total percentage of solids
- pH value
- Conductivity
Optional quality control
- Viscosity
- LPC (Bulk counter)
- PSD (Particle Size Distribution)
- Zeta potential (Electrokinetic potential)
- Metal analytics
- Silica
Requirements
- Waste water free from organic solvents and oxidizing agents
- No copper or tungsten impurities
- Temperature: 15°C – 30°C / 59°F – 86°F
- pH value: 2 – 11
Mix & Transfer Module
The Mix & Transfer module includes two mixing tanks and one transfer tank. The mixing tank module is used for mixing the recycled slurry with the original slurry according to the specified recycling rate.
The storage tank is used to buffer the finished mixed slurry. From the storage tank, the processed slurry is available for the process again via a transfer pump. The module is automated and equipped with modern monitoring technology. The overall control of the module is operated by the central recycling module.
Original Slurry Supply System
The chemical supply module is used to supply the original slurry to the Mix & Transfer module and it is equipped with two slots for chemical containers. By accommodating two containers, it is possible to switch automatically from an empty container to a full container, thus ensuring an uninterrupted supply. In addition, a redundant pump module is integrated for an uninterruptible supply. The chemical supply module is automated and controlled by the central recycling module.
Chemical Supply Module
The chemical supply module is used to supply the original chemicals to the recycling module, and it is equipped with two bays for chemical containers. By accommodating two containers, it is possible to switch automatically from an empty container to a full container, thus ensuring an uninterrupted supply. In addition, a redundant pump module is integrated for an uninterruptible supply. The chemical supply module is automated and controlled by the central recycling module.
CMP Wastewater buffer tank
The CMP wastewater buffer tank serves as a buffer tank for the process of wastewater. The tank is equipped with a pump, pumping the wastewater to the recycling module, according to its requirement. The buffer tank is automated and controlled by the central recycling module.
Analysis Module
The analysis module serves as an additional monitoring of the Mix & Transfer module. Additional sensors and a sampling point are installed in the module, enabling the detailed online monitoring of the mixture. The measured values are recorded and visualized in the overall control of the recycling module.
Permeate Tank
The separate permeate tank is only required for a recycling module of size 8UF or larger. The permeate tank serves as a collection container for the water being extracted from the recycling process (permeates). The permeate can be used for backwashing the ultrafilters in the recycling module or for on-site plant supply. For on-site plant supply, depending on the application, it may be necessary for the permeated to be reprocessed with an optionally downstream water treatment.
Recirculation Tank
The separate recirculation tank is required only for a recycling module of size 8UF or larger. The wastewater to be recycled on site is fed to the tank from the upstream buffer tank, which is concentrated in further process steps in the recirculation process via ultrafiltration. After reaching the specified solids concentration, the entire contents of the tank are pumped into the Mix & Transfer module. The recirculation tank is automated and controlled by the central recycling module.
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